VIGOUR Product Express | Flow Switch VEFS2 Series

Driven by artificial intelligence, high-performance computing (HPC), automotive electronics, and Internet of Things applications, the semiconductor industry is undergoing a rapid transformation. This remarkable growth, however, has also introduced new operational challenges. As production scales expand at an unprecedented rate, high‑risk specialty gases such as silane and phosphine are widely used in semiconductor fabs. Any uncontrolled gas leakage caused by pipeline rupture, loose fittings, seal failure, or improper installation can quickly escalate into a severe safety incident, threatening personnel safety, damaging critical production equipment, and causing costly unplanned downtime. Against this background, VIGOUR's Excess Flow Switch (EFS), with its purely mechanical actuation design and exceptional ultra-high-purity (UHP) compatibility, has become an indispensable safety safeguard for specialty gas supply systems, including Gas Cabinets and VMBs, in semiconductor manufacturing lines worldwide.

 The core design principle of the VIGOUR EFS is to detect abnormal flow conditions and respond reliably. When a downstream pipeline failure results in a sudden and excessive flow surge that exceeds the pre-set critical trip point, the device immediately triggers a response signal. This signal is transmitted through the opening or closing of electrical contacts in the built-in reed switch, which is then synchronized and sent to the SCADA system or the Gas Monitoring System (GMS). By providing real-time alerts and enabling rapid automated responses, it supports proactive safety management, effectively mitigates potential hazards, and strengthens the overall reliability of the gas delivery network.

In semiconductor manufacturing processes, every component in the gas system can become a potential source of contamination. Even tiny particles, metallic impurities, or surface adsorption can compromise wafer quality and reduce production yields. Therefore, VIGOUR strictly adheres to the stringent standards of the semiconductor industry to ensure material purity, surface cleanliness, and operational stability.

In terms of material standards, VIGOUR exclusively uses 316L stainless steel produced through VIM/VAR double-melting technology. This advanced metallurgical process significantly reduces metallic inclusions and residual impurities, ensuring excellent corrosion resistance and minimizing the risk of gas contamination. For surface treatment, all products undergo advanced electropolishing (EP), maintaining an internal surface roughness of 5–10 μin. Such a smooth, clean interior prevents gas molecules from adsorbing onto the inner walls and eliminates particle precipitation, supporting stable and contamination-free gas delivery.

Furthermore, VIGOUR EFS offers a wide selection of critical trip points and flexible configuration options to suit diverse application scenarios. Through simple parameter matching, users can easily determine the accurate model based on specific gas types, operating pressure conditions, and maximum allowable flow rates. This high degree of customization ensures precise and reliable over-flow protection for various ultra-high-purity gas applications in modern semiconductor fabrication.

  Flow switch for high flow applications

 Available with horizontal or vertical main line

 Minimal pressure drop through the device

 SS 316L stainless steel