You Professional Gas Delivery System Suppliers！
With over 20 years of experience in the production and import-export of pressure regulators, Shanghai Vigour Technologies has built a solid reputation in the field of gas flow design. From the early days of TUFFCO to today's VIGOUR brand, our name is well-known as a trusted supplier of valves and gas flow design solutions both domestically and internationally.
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![VIGOUR Specialty VMB Valve Manifold Box]()
VIGOUR Specialty VMB Valve Manifold BoxProduct Features VIGOUR VMB Valve Manifold Box is a modular gas distribution and control system specifically designed for high-purity electronic-grade inert gases (such as CF₄, SF₆, Ar, He, etc.). -
![VIGOUR Specialty Gas Cabinet]()
VIGOUR Specialty Gas CabinetProduct Features VIGOUR Specialty Gas Cabinet is a high-safety gas supply system specifically designed for flammable, pyrophoric, corrosive, and toxic gases (such as Silane (SiH₄), Hydrogen Chloride -
![VIGOUR Specialty Gas Rack]()
VIGOUR Specialty Gas RackProduct Features VIGOUR Specialty Gas Control Rack is an intelligent gas supply system specifically designed for high-purity electronic-grade specialty gases (such as inert and corrosive gases). It
Why choose us
Our Factory
VIGOUR head office is located in Songjiang G60 Science and Technology Innovation Port, 8000㎡ Area covers, 200 Number of employees, 1500 Class 100 Clean Room.
Rich in experience
The team has rich experience, complete technical products, and strong cutting-edge research and development capabilities, and is committed to providing intelligent fluid control solutions to ensure that customers enjoy high-quality products and ultimate experience.
Our Certifications
Haogu has obtained over 30 EU CE (PED ISO2503), ISO9001, Rohs invention patent certificates, and utility model certificates.
Gas Delivery System - Overview
The distribution system moves gas to end-use customers. Pressure within the distribution pipe is controlled by devices called regulators, which reduce pressure as needed. The last part of the distribution system is the service pipe that delivers gas to a specific customer and the service meter.
Types of Gas Delivery System
We offer the following Product introduce:
VMB Valve Manifold Box
VMB Valve Manifold Box is a modular gas distribution and control system specifically designed for high-purity electronic-grade inert gases (such as CF₄, SF₆, Ar, He, etc.).
Specialty Gas Cabinet
Specialty Gas Cabinet is a high-safety gas supply system specifically designed for flammable, pyrophoric, corrosive, and toxic gases (such as Silane (SiH₄), Hydrogen Chloride (HCl), Hydrogen (H₂), etc.).
Specialty Gas Rack
Specialty Gas Control Rack is an intelligent gas supply system specifically designed for high-purity electronic-grade specialty gases (such as inert and corrosive gases).
Product Specification
We offer the following Product Specifications:
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Category |
Details |
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Model: |
Specialty Gas Cabinet (VGC Series) |
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Applicable Gases: |
Flammable/pyrophoric gases (e.g., SiH₄, H₂), corrosive gases (e.g., HCl), toxic gases |
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Gas Supply: |
Cylinder supply (single or dual-cylinder configuration available) |
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Power Supply: |
110–240V AC |
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Housing Material: |
Corrosion-resistant welded steel |
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Exhaust Pipe: |
Pre-installed top-mounted exhaust pipe, supports quick connection to external ventilation |
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Door Design: |
Auto-closing fire-rated door with mechanical interlock device |
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Category |
Parameter Details |
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Model: |
VMB Valve Manifold Box |
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Applicable Gases: |
Inert gases (CF₄, SF₆, CHF₃, Ar, He, etc.) |
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Gas Supply Mode : |
Single-cylinder / Dual-cylinder configuration optional |
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Power Supply: |
110~240V AC |
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Material: |
Valves and tubing components: SS 316L |
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Protection Level: |
SEMI S2 compliant, corrosion-resistant design |
Features of VMB Valve Manifold Box
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Efficient Gas Distribution
1) Supports single-cylinder or dual-cylinder configuration with optional automatic switchover for continuous, uninterrupted gas supply.
2) Built-in multi-valve design to flexibly meet complex gas distribution needs. -
High Cleanliness and Sealing
1) Valves and tubing are made of SS 316L material; the entire system is assembled in a Class 100 cleanroom to prevent particle contamination.
2) Helium leak detection standard: leak rate ≤ 1×10⁻⁸ mbar·l/s He, meeting ultra-high sealing requirements. -
Intelligent Control
1) Optional PLC control system, supporting Modbus communication interface for integration into smart monitoring platforms, enabling remote operation and data management.
2) Touchscreen display for real-time monitoring of cylinder pressure, gas flow rate, and alarm status with an intuitive user interface. -
Multiple Safety Protections
1) High/Low pressure audible and visual alarms that automatically trigger emergency gas shutoff.
2) Optional venting and purging functions, integrated with a safety relief device to prevent system overpressure.
3) Complies with SEMI S2 standards and international fire safety codes, with maximum working pressure up to 110% of the test pressure.
Application of Specialty Gas Cabinet
Semiconductor Manufacturing
Safe supply of specialty gases like Silane (SiH₄) and Ammonia (NH₃) for deposition processes.
Photovoltaic Industry
Precise control of Hydrogen (H₂) used in solar cell production.
Biopharmaceuticals
Safe storage and delivery of corrosive gases (e.g., HCl) in sterile environments.
Research Laboratories
Sealed management and leak protection for toxic gases.
Certifications
FAQ
We're professional gas delivery system manufacturers and suppliers in China, specialized in providing high quality customized service. We warmly welcome you to wholesale gas delivery system for sale here from our factory. For quotation, contact us now.
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