Product Features
VIGOUR VMB Valve Manifold Box is a modular gas distribution and control system specifically designed for high-purity electronic-grade inert gases (such as CF₄, SF₆, Ar, He, etc.). By integrating multiple valves, intelligent monitoring, and cleanroom-grade assembly, it ensures gas purity, stability, and safety during distribution. It is widely used in semiconductor manufacturing, photovoltaic energy production, research laboratories, and other fields requiring precise gas management.
Technical Specifications
| Category | Parameter Details |
|---|---|
| Model: | VMB Valve Manifold Box |
| Applicable Gases: | Inert gases (CF₄, SF₆, CHF₃, Ar, He, etc.) |
| Gas Supply Mode : | Single-cylinder / Dual-cylinder configuration optional |
| Power Supply: | 110~240V AC |
| Material: | Valves and tubing components: SS 316L |
| Protection Level: | SEMI S2 compliant, corrosion-resistant design |
Core Functions and Features
Efficient Gas Distribution
1)Supports single-cylinder or dual-cylinder configuration with optional automatic switchover for continuous, uninterrupted gas supply.
2)Built-in multi-valve design to flexibly meet complex gas distribution needs.
High Cleanliness and Sealing
1)Valves and tubing are made of SS 316L material; the entire system is assembled in a Class 100 cleanroom to prevent particle contamination.
2)Helium leak detection standard: leak rate ≤ 1×10⁻⁸ mbar·l/s He, meeting ultra-high sealing requirements.
Intelligent Control
1)Optional PLC control system, supporting Modbus communication interface for integration into smart monitoring platforms, enabling remote operation and data management.
2)Touchscreen display for real-time monitoring of cylinder pressure, gas flow rate, and alarm status with an intuitive user interface.
Multiple Safety Protections
1)High/Low pressure audible and visual alarms that automatically trigger emergency gas shutoff.
2)Optional venting and purging functions, integrated with a safety relief device to prevent system overpressure.
3)Complies with SEMI S2 standards and international fire safety codes, with maximum working pressure up to 110% of the test pressure.
Application
1)Semiconductor Manufacturing: Precise distribution of high-purity inert gases for wafer etching and deposition processes.
2)Photovoltaic Industry: Stable supply of specialty gases (such as SF₆) for solar panel production.
3)Research Laboratories: Centralized control and management of multi-channel gas experiments.
4)Biopharmaceutical Industry: Safe transmission and distribution of inert gases in sterile environments.
Drawings
Semi-Automatic
The system includes automatic shut-off and purging functions, with a 3/8" main line and 1/4" branch lines (1 inlet, 4 outlets). It features PLC control, a 7-inch touchscreen interface, and branch line pressure regulation. Additionally, the system is equipped with panel surface heating for enhanced performance.
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The system includes manual gas supply and process gas purging functions, with a 3/8" main line and 1/4" branch lines (1 inlet, 4 outlets). It features branch line pressure regulation for optimal control.
FAQ
Q1: How does the system switch between single and dual-cylinder configurations?
A: The dual-cylinder configuration supports automatic switchover (requires PLC module). When the primary cylinder's pressure drops, the system automatically switches to the backup cylinder to ensure continuous supply.
Q2: How is gas leakage detected?
A: System integrity is verified via helium mass spectrometry leak detection. Daily monitoring can be performed through abnormal pressure trends or alarm prompts displayed on the touchscreen.
Q3: Can the touchscreen export historical data?
A: The standard touchscreen supports real-time data display. If equipped with a PLC module, data can be exported in CSV format via a USB interface or communication protocols (such as Modbus).
Q4: What is the recommended maintenance cycle?
A: It is recommended to inspect valve sealing and leak rates every six months and calibrate pressure sensors annually. In high-frequency usage environments, inspections should be performed every three months.
Q5: Does the system support corrosive gases?
A: This model is designed for inert gases. If corrosive gases (e.g., HCl) need to be handled, customization with duplex stainless steel materials and special seals is required. Please contact technical support for details.
Q6: What should be considered during installation?
A: Ensure a clean and vibration-free installation environment, reserve power and exhaust connections, and make sure the gas cylinder area meets the load-bearing requirement (≥500kg/m²).
Conclusion
VIGOUR VMB Valve Manifold Box (VMB) offers reliable solutions for high-purity gas management through precision control and rigorous safety standards. For customized configurations or detailed technical specifications, please contact the official VIGOUR service team.
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