Model
VDV31UA
Introduction
• UHP diaphragm valve
• Stainless steel 316L body for corrosive gases
• Inlet pressure max 300 bar
• Left or Right lever direction for Shutoff
• Wide range of inlets and outlets
• Metal-to-metal seal to atmosphere
Technical parameters
| Max. Working Pressure | 4500 psig (300 bar) |
|
| Max. Working Temp | 14°F ~ 104°F (-10℃ ~ 40℃) | |
| Materials | ||
| Body | 316L | |
| Diaphragm | Elgiloy® | |
| Seat packing | PCTFE | |
| Handle | AL | |
| Internal Leakage Allowance | 1x10^-9 mbar I/s He | |
| External Leakage Allowance | 1x10^-9 mbar I/s He | |
| Flow capacity | Cv=0.1 | |
| Orifice | Ф2.7mm | |
| Weight | approx. 0.25kg | |
VDV32UB
Introduction
• Suitable for high purity, flammable or toxic fluid gases
• Direct diaphragm construction with superior sealing
performance, remarkable durability, compactness and particle
and dead-space-free performance
• Valve open and closed opsition is easily visible at a glance
• Excellent gas displacement characteristics
• Standard seat material is PCTFE, Polyimide/PFA is option
Technical parameters
| Max. Working Pressure | 150 psig (10 bar) |
|
| Pneumatic Operating Pressure | 58~87psig (4-6bar) | |
| Max. Working Temp | 14°F ~ 104°F (-10℃ ~ 40℃) | |
| Materials | ||
| Body | 316L | |
| Diaphragm | Elgiloy® | |
| Seat packing | PCTFE | |
| Handle | AL | |
| Internal Leakage Allowance | 1x10^-9 mbar I/s He | |
| External Leakage Allowance | 1x10^-9 mbar I/s He | |
| Flow capacity | 1/4"Cv=0.3 3/8"1/2"Cv=0.65 | |
| Weight | approx. 0.27kg | |
Product picture
VDV33UB
Introduction
• Suitable for ultra-pure, flammable or toxic fluid lines in semiconductor
manufacturing equipment and facilities
• Direct diaphragm construction with superior sealing
performance, remarkable durability, compactness and particle and
dead-space-free performance
• Valve open and closed position is easily visible at a glance
• Excellent gas displacement characteristics
• EP treatment is standard for all wetted surfaces
• Standard seat material is PCTFE, Polyimide/PFA is option
Technical parameters
| Max. Working Pressure | 3000 psig (206 bar) |
|
| Pneumatic Operating Pressure | 58~87psig (4-6bar) | |
| Max. Working Temp | 14°F ~ 104°F (-10℃ ~ 40℃) | |
| Surface finish | 10μin. Ra | |
| Materials | ||
| Body | 316L | |
| Diaphragm | Elgiloy® | |
| Seat packing | PCTFE | |
| Handle | AL | |
| Internal Leakage Allowance | 1x10^-9 mbar I/s He | |
| External Leakage Allowance | 1x10^-9 mbar I/s He | |
| Flow capacity | 1/4"Cv=0.1 3/8"1/2"Cv=0.5 | |
| Weight | approx. 0.27kg | |
Products Description
VDV52UB
Introduction
• Suitable for ultra-pure, flammable or toxic fluid lines in semiconductor
manufacturing equipment and facilities
• Direct diaphragm construction with superior sealing
performance, remarkable durability, compactness and particle and
dead-space-free performance
• Valve open and closed position is easily visible at a glance
• Excellent gas displacement characteristics
• EP treatment is standard for all wetted surfaces
• Standard seat material is PCTFE, Polyimide/PFA is option
Technical parameters
| Max. Working Pressure | 300 psig (20 bar) |
|
| Pneumatic Operating Pressure | 58~87psig (4-6bar) | |
| Max. Working Temp | 14°F ~ 104°F (-10℃ ~ 40℃) | |
| Surface finish | 10μin. Ra | |
| Materials | ||
| Body | 316L | |
| Diaphragm | Elgiloy® | |
| Seat packing | PCTFE | |
| Handle | AL | |
| Internal Leakage Allowance | 1x10^-9 mbar I/s He | |
| External Leakage Allowance | 1x10^-9 mbar I/s He | |
| Flow capacity | 1/4"Cv=0.3 3/8"1/2"Cv=0.65 | |
| Weight | approx. 0.27kg | |
Product picture
VDV22UB
Introduction
• Suitable for ultra-pure, flammable or toxic fluid lines in semiconductor
manufacturing equipment and facilities
• Direct diaphragm construction with superior sealing
performance, remarkable durability, compactness and particle and
dead-space-free performance
• Valve open and closed position is easily visible at a glance
• EP treatment is standard for all wetted surfaces
• Standard seat material is PCTFE, Polyimide/PFA is option
Technical parameters
| Max. Working Pressure | 150 psig (10 bar) |
|
| Pneumatic Operating Pressure | 58~87psig (4-6bar) | |
| Max. Working Temp | 14°F ~ 104°F (-10℃ ~ 40℃) | |
| Surface finish | 10μin. Ra | |
| Materials | ||
| Body | 316L | |
| Diaphragm | Elgiloy® | |
| Seat packing | PCTFE | |
| Handle | AL | |
| Internal Leakage Allowance | 1x10^-9 mbar I/s He | |
| External Leakage Allowance | 1x10^-9 mbar I/s He | |
| Flow capacity | 1/4"Cv=0.3 3/8"1/2"Cv=0.65 | |
| Weight | approx. 0.27kg | |
VDV36
Introduction
• Excellent degassing characteristics is achieved through
minimized flow paths by combining 2 of VDV32,VDV33
UHP diaphragm valves together in one valve body.
• Fewer welds over standard valve alignments
• Reduces space requirements
• Compact tubing arrangement
• Dead space free configuration
Technical parameters
| Max. Working Pressure | 150 psig (10 bar) 3000 psig (206 bar )optional |
|
| Pneumatic Operating Pressure | 58~87psig (4-6bar) | |
| Max. Working Temp | 14°F ~ 104°F (-10℃ ~ 40℃) | |
| Surface finish | 10μin. Ra | |
| Materials | ||
| Body | 316L | |
| Diaphragm | Elgiloy® | |
| Seat packing | PCTFE | |
| Handle | AL | |
| Internal Leakage Allowance | 1x10^-9 mbar I/s He | |
| External Leakage Allowance | 1x10^-9 mbar I/s He | |
| Flow capacity | Cv=0.3(low pressure) Cv=0.1 (High pressure) | |
| Weight | approx. 0.27kg | |
VDV37
Introduction
• Suitable for ultra-pure, flammable or toxic fluid lines in
semiconductor manufacturing equipment and facilities
• Direct diaphragm construction with superior sealing
performance, remarkable durability, compactness and
particle free performance
• Valve open and closed position is easily visible at a glance
• Excellent gas displacement characteristics
• EP treatment is standard for all wetted surfaces
• Standard seat material is PCTFE, Polyimide is option
Technical parameters
| Max. Working Pressure | 250 psig (17 bar) |
|
| Pneumatic Operating Pressure | 80~100psig (5.5-6.8bar) | |
| Max. Working Temp | -40°F ~ 159°F (-40℃ ~ 71℃) | |
| Surface finish | 10μin. Ra | |
| Materials | ||
| Body | 316L | |
| Diaphragm | Elgiloy® | |
| Seat packing | PCTFE | |
| Handle | AL | |
| Internal Leakage Allowance | 1x10^-9 mbar I/s He | |
| External Leakage Allowance | 1x10^-9 mbar I/s He | |
| Flow capacity | Cv=2.8 | |
| Weight | approx. 1.36 kg | |
VDV38
Introduction
• Suitable for ultra-pure, flammable or toxic fluid lines in
semiconductor manufacturing equipment and facilities
• Direct diaphragm construction with superior sealing
performance, remarkable durability, compactness and
particle free performance
• Valve open and closed position is easily visible at a glance
• Excellent gas displacement characteristics
• EP treatment is standard for all wetted surfaces
• Standard seat material is PCTFE, Polyimide is option
Technical parameters
| Max. Working Pressure | 3000 psig (206 bar)/ 1300 psig (90bar) |
|
| Actuation Pressure | 70~110 psig (5-8bar) | |
| Max. Working Temp | -40°F ~ 159°F (-40℃ ~ 71℃) | |
| Surface finish | 10μin. Ra | |
| Materials | ||
| Body | 316L | |
| Diaphragm | Elgiloy® | |
| Seat packing | PCTFE | |
| Handle | AL | |
| Internal Leakage Allowance | 1x10^-9 mbar I/s He | |
| External Leakage Allowance | 1x10^-9 mbar I/s He | |
| Flow capacity | manual actuator Cv=1.0 | |
| pneumatic actuator | Cv=1.0 (90bar) / Cv=0.7 (206 bar) | |
| Weight | approx. 1.27 kg | |
VDV39
Introduction
• Suitable for ultra-pure, flammable or toxic fluid lines in semiconductor manufacturing equipment and facilities
• Direct diaphragm construction with superior sealing performance, remarkable durability, compactness and
particle and dead-space-free performance
• The product is fabricated in compliance with the VS001A process specification
• Valve open and closed position is easily visible at a glance
• Excellent gas displacement characteristics
• EP treatment is standard for all wetted surfaces
• Standard seat material is PCTFE, Polyimide is option
Technical parameters
| Max. Working Pressure | 270 psig (18.6 bar) |
|
| Pneumatic Operating Pressure | 80~100psig (5.5-6.8bar) | |
| Max. Working Temp | 14°F ~ 104°F (-10℃ ~ 40℃) | |
| Surface finish | 10μin. Ra | |
| Materials | ||
| Body | 316L | |
| Diaphragm | Elgiloy® | |
| Seat packing | PCTFE | |
| Handle | AL | |
| Internal Leakage Allowance | 1x10^-9 mbar I/s He | |
| External Leakage Allowance | 1x10^-9 mbar I/s He | |
| Flow capacity | Cv=2.8 | |
| Weight | approx. 1.0 kg | |
Product picture
VDV40
Introduction
• Suitable for ultra-pure, flammable or toxic fluid lines in semiconductor manufacturing equipment and facilities
• Direct diaphragm construction with superior sealing performance, remarkable durability, compactness and
particle free performance
• The product is fabricated in compliance with the VS001A process specification
• Valve open and closed position is easily visible at a glance
• Excellent gas displacement characteristics
• EP treatment is standard for all wetted surfaces
• Standard seat material is PCTFE, Polyimide is option
Technical parameters
| Max. Working Pressure | 3000 psig (206 bar) |
|
| Actuation Pressure | 70~110 psig (5-8bar) | |
| Max. Working Temp | -40°F ~ 160°F (-40℃ ~71℃) | |
| Surface finish | 10μin. Ra | |
| Materials | ||
| Body | 316L | |
| Diaphragm | Elgiloy® | |
| Seat packing | PCTFE | |
| Handle | AL | |
| Internal Leakage Allowance | 1x10^-9 mbar I/s He | |
| External Leakage Allowance | 1x10^-9 mbar I/s He | |
| Flow capacity | pneumatic actuator Cv=0.23 manual actuator Cv=0.29 | |
| Weight | approx. 1.27 kg | |
UHP Ultra High Purity Diaphragm Valve Technical Description
The UHP Diaphragm Valve (Ultra High Purity) is specially designed for industries with extremely high gas purity requirements, such as semiconductor, photovoltaic, and biopharmaceutical sectors. It ensures leak-free and contamination-free gas delivery, complying with ultra-clean standards. The core feature of the valve is its diaphragm isolation design, which prevents contact between the valve stem and the medium, completely eliminating the risk of particulate release.
Key Features
Manual Type: Ideal for low-frequency operation or small flow scenarios, with a simple and reliable design. It comes with a high-precision graduated handwheel for fine adjustments.
Pneumatic Type: Integrated with an actuator (single-acting/double-acting), supports PLC control, and opens/closes in less than 1 second, making it suitable for automated production lines and high-frequency applications.
VCR (Vacuum Coupling Retaining): Metal gasket seal, ideal for ultra-high vacuum (≤10⁻⁹ Torr) and ultra-pure gas systems. Standard 316L stainless steel interior with Ra≤0.2μm electropolish finish.
NPT (National Pipe Thread): Tapered thread seal, needs PTFE tape or sealant, suitable for medium to low-pressure industrial applications.
Tube Fitting: Swagelok® compatible design for quick connection and installation. Ideal for small diameter systems (1/8"–1/2").
Pressure Range: Vacuum to 1500 psig (custom models available up to 6000 psig).
Flow Control: Cv values from 0.02 to 2.5, with a zero dead leg valve body design to reduce medium residue.
Leak Rate: Helium leak rate ≤1×10⁻⁹ cc/sec, meeting SEMI F20 leak standards.
Body Material: ASTM A182 F316L ultra-low carbon stainless steel with EP (electropolished) + passivation treatment.
Diaphragm: PTFE/FKM/PFA composite laminated diaphragm, with temperature resistance from -20°C to 180°C and lifespan >1 million cycles.
Sealing: Full metal bellows secondary seal to eliminate external leakage risk.
Low Pressure, Micro-Flow: VDV32 UA series, 1/4" VCR interface, Cv=0.02, suitable for Ar/N₂ carrier gas control.
Medium to High Pressure: VDV52UB,VDV37 UB series, 1/2" NPT interface, burst pressure ≥3000 psig, suitable for corrosive gases (Cl₂/HCl).
High Cleanliness Requirements: VDV31UA, VDV38UB,VDV40UB series, full-flow EP + plasma cleaning, SIMS analysis of metal ion content <1 ppb.
Common Issues & Q&A
How to choose between manual or pneumatic?
Manual valves are suited for debugging or maintenance, while pneumatic valves require solenoids and air sources, ideal for automated production lines.
VCR and NPT interface compatibility?
VCR requires metal gaskets (e.g., nickel/copper) for ultra-high sealing; NPT should avoid sealant contamination and is best used for non-sensitive media.
What affects diaphragm lifespan?
Frequent switching, corrosive media, and temperature fluctuations accelerate aging. It is recommended to replace the diaphragm every 2 years or after 500,000 cycles.
How to verify valve cleanliness?
It must pass SEMI F19 particle testing (≤5 particles/ft³ @0.1μm) and GC-MS organic residue analysis.
Application Scenarios
Special gas delivery in wafer factories (SiH₄/NH₃)
Pharmaceutical industry WFI (Water for Injection) piping
Carrier gas systems for analytical instruments (GC/ICP-MS)
Hot Tags: UHP diaphragm valve, China UHP diaphragm valve manufacturers, suppliers, Gas High Pressure Hoses, hp accessories, Pressure Control Panels, Dual Stage Gas Pressure Regulator, IGS Gas Base Block, Pressure Regulator Extension
