Product Features
VIGOUR Specialty Gas Cabinet is a high-safety gas supply system specifically designed for flammable, pyrophoric, corrosive, and toxic gases (such as Silane (SiH₄), Hydrogen Chloride (HCl), Hydrogen (H₂), etc.). Featuring a fully enclosed structure, intelligent monitoring, and multiple safety protections, it ensures the continuous and stable supply of electronic-grade specialty gases. It meets the stringent requirements for gas purity and operational safety in industries such as semiconductors, photovoltaics, and biopharmaceuticals.
Technical Specifications
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| Category | Details |
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| Model: | Specialty Gas Cabinet (VGC Series) |
| Applicable Gases: | Flammable/pyrophoric gases (e.g., SiH₄, H₂), corrosive gases (e.g., HCl), toxic gases |
| Gas Supply: | Cylinder supply (single or dual-cylinder configuration available) |
| Power Supply: | 110–240V AC |
| Housing Material: | Corrosion-resistant welded steel |
| Exhaust Pipe: | Pre-installed top-mounted exhaust pipe, supports quick connection to external ventilation |
| Door Design: | Auto-closing fire-rated door with mechanical interlock device |
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Core Functions and Features
Safe and Stable Gas Supply
1)Supports single-cylinder or dual-cylinder configurations, with optional automatic switchover function to enable uninterrupted gas supply.
2)Integrated evacuation and purging functions, equipped with safety pressure relief devices.
High Protection Design
1)Valves and pipelines are made of SS 316L material. The entire system is welded and assembled in a Class 100 cleanroom to eliminate contamination.
2)Helium leak detection standard: Leak rate ≤ 1×10⁻³ mbar·l/s He, ensuring excellent sealing performance.
3)Corrosion-resistant housing: Welded steel enclosure with anti-corrosion surface treatment; 1/4-inch steel-reinforced glass window for optional viewing.
Intelligent Control
1)Optional PLC control system, supporting Modbus communication interface for integration into intelligent monitoring platforms and remote management.
2)10-inch touchscreen displays real-time cylinder pressure, gas flow, and alarm status, with an intuitive user interface.
Multiple Safety Mechanisms
1)High and low-pressure audible and visual alarms that trigger automatic emergency gas shutoff.
2)Optional configurations include UV-JR flame detectors, excess flow switches (EFS), and gas detection systems (GDS) for hazardous gas leaks.
3)Compliant with SEMI S2 standards and international fire safety regulations; maximum working pressure is 110% of the test pressure.
Application
1)Semiconductor Manufacturing: Safe supply of specialty gases like Silane (SiH₄) and Ammonia (NH₃) for deposition processes.
2)Photovoltaic Industry: Precise control of Hydrogen (H₂) used in solar cell production.
3)Biopharmaceuticals: Safe storage and delivery of corrosive gases (e.g., HCl) in sterile environments.
4)Research Laboratories: Sealed management and leak protection for toxic gases.
Drawings
Automatic high pressure gas Cabinet
Automatic switching, automatic purging, 47L dual-process cylinder: 1/4" tubing, PLC control, 10-inch touchscreen, tower light, negative pressure gauge, differential pressure switch, spray nozzle, etc. Smoke detector, temperature sensor, UV/IR sensor, EFS.
Automatic Low pressure gas Cabinet
Automatic switching and purging, 47L dual-process cylinder with 1/4" tubing, PLC control, 10-inch touchscreen, tower light, negative pressure gauge, differential pressure switch, spray nozzle, etc. Equipped with smoke and temperature sensors, scale, cylinder heating, and panel surface heating.
Semi-Automatic high pressure gas Cabinet
Automatic purging, 47L single-process cylinder with 1/4" tubing, PLC control, 10-inch touchscreen, tower light, negative pressure gauge, differential pressure switch, spray nozzle, etc. Equipped with smoke and temperature sensors, UV/IR sensor, and EFS.
Semi-Automatic low pressure gas Cabinet
Automatic purging, 47L single-process cylinder with 1/4" tubing, PLC control, 10-inch touchscreen, tower light, negative pressure gauge, differential pressure switch, spray nozzle, etc. Equipped with smoke and temperature sensors, scale, cylinder heating, and panel surface heating.
FAQ
Q1: How to switch between single and dual-cylinder configurations?
A: Dual-cylinder setups support automatic switchover (requires a fully automatic actuator). When the main cylinder pressure is low, the system automatically switches to the backup cylinder.
Q2: How to handle flammable gas leaks?
A: The system can integrate UV-JR flame detectors and ventilation systems to immediately cut off the gas supply and activate ventilation upon detecting leaks or flames.
Q3: Can the touchscreen export historical data?
A: The standard touchscreen supports real-time data display. If equipped with the optional PLC module, historical records can be exported via USB or communication interfaces in CSV format.
Q4: Is regular calibration of sensors necessary?
A: It is recommended to calibrate pressure sensors and gas detectors every six months; shorten the interval to every three months under harsh conditions.
Q5: How to ensure compatibility with corrosive gases?
A: Customization with duplex stainless steel pipelines and fluororubber seals is required. Please contact technical support for specific solutions.
Q6: What are the installation environment requirements for the cabinet?
A: Install away from heat sources and vibrations, ensure floor load capacity ≥ 500 kg/m², and reserve interfaces for exhaust ducts and power outlets.
Conclusion:
VIGOUR Specialty Gas Cabinet, through modular design and strict safety certifications, provides a comprehensive solution for managing high-risk gases. For customized models or further technical details, please contact the official VIGOUR support team.
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