- VIGOUR's IGS flow control valves feature a modular design, compact structure, enabling easy to install and maintain quickly;
- Adopts metal diaphragms as the core sealing and driving components, ensuring ultra-high sealing performance and cleanliness;
- The micrometer handle is adjustable in increments of 2.5 microns, offering high adjustment resolution for precise and repeatable flow setting;
- Features a simple flow channel structure with zero dead band, allowing easy removal of trace residues to ensure residue-free and pollution-free medium passage;
- Constructed from SS316L secondary refined material, it minimizes the generation and adsorption of particulate matter, meeting the requirements of ultra-high purity environments such as semiconductor applications.
IGS FLOW CONTROL VALVES
VIM Series
Product Features
|
W-seal and C-seal optional
The wet surface is treated with EP. Max. 5μin. Ra
Material: 316L VIM-VAR
100% Helium-leak-tested |
|
Technical Data
|
Item |
Specification |
|---|---|
|
Max. Working Pressure |
150 psig |
|
Max. Working Temperature |
14℉～302℉ (-10℃～150℃) |
|
Nominal Diameter |
Ф1.0 (Ф2.5 optional) |
|
Body Material |
316L VIM-VAR |
|
Sealing Material |
Elgiloy® |
|
Leak Rate (to atmosphere) |
1×10⁻⁹ mbar·l/s He |
|
Leak Rate (via seat) |
Fixed at less than 1% of the Cv value |
|
Flow Capacity |
Cv=0.03 (Ф1.0) |
Ordering Information
Shanghai Vigour Technologies Co., Ltd. specializes in high-purity fluid control solutions, providing premium products for semiconductor, photovoltaic, hydrogen energy, laboratory and other high-end precision industries. The independently developed IGS flow control valves feature a modular and compact structure for easy and efficient installation and maintenance. With metal diaphragm sealing, 316L VIM‑VAR high-purity material and EP precision surface treatment, which achieve ultra-high tightness and cleanliness. They offer micron-level adjustment accuracy, zero dead-band flow path and low particle adsorption, and pass 100% helium leak test to stably meet ultra-pure process requirements. With reliable performance, strict quality and professional service, IGS flow control valves have become a trusted and preferred choice for flow control in high-end manufacturing.
