Product Features
VIGOUR Specialty Gas Control Rack is an intelligent gas supply system specifically designed for high-purity electronic-grade specialty gases (such as inert and corrosive gases). It is suitable for environments requiring stringent gas purity, stability, and safety standards. Featuring modular design, cleanroom manufacturing processes, and multiple layers of safety protection, the system ensures continuous and reliable gas supply. It is widely used in industries such as semiconductors, biopharmaceuticals, and photovoltaic energy.
Technical Specifications
|
Category |
Parameter Details |
|
Applicable Gases |
Inert gases (e.g., CF₄, SF₆, CHF₃, Ar, He, etc.) |
|
Gas Supply Mode |
Cylinder supply (single/dual cylinder configurations available) |
|
Power Supply |
110~240V AC |
|
Materials |
Valves and piping: SS 316L stainless steel |
|
Protection Level |
Compliant with SEMI S2 and explosion-proof requirements |
Core Functions and Features
Safe and Stable Gas Supply
1)Supports continuous gas supply with either single-cylinder or dual-cylinder (single/dual cylinder configuration) setups to prevent supply interruptions.
2)Optional venting and purging functions, integrated with a safety relief device to mitigate overpressure risks.
High Cleanliness Design
1)Valves and piping components are made from SS 316L stainless steel.
2)The entire system is welded and assembled in a Class 100 cleanroom environment to ensure no particle contamination.
3)Helium leak detection standard: leakage rate ≤ 1×10⁻⁶ mbar·l/s (He).
Intelligent Control
1)Optional PLC control system available, supporting communication interfaces (such as Modbus) for integration with intelligent monitoring platforms and enabling remote management.
2)Touchscreen display shows real-time cylinder pressure, gas consumption, and alarm status.
Multiple Safety Protections
1)High/low pressure audible and visual alarms that automatically trigger emergency gas shut-off upon activation.
2)Complies with SEMI S2 standards and international fire safety codes; maximum working pressure is 110% of test pressure.
Application
1)Semiconductor Manufacturing: Specialty gas supply for wafer processing and etching applications.
2)Biopharmaceuticals: Precise control of high-purity inert gases in sterile environments.
3)Photovoltaic Energy: Process gas management during solar panel production.
4)Research Laboratories: Safe gas supply systems for universities and research institutes.
Drawings
Automatic high pressure gas Rack
The system features automatic switching and purging, equipped with a 47L dual-process cylinder connected via 1/4" tubing. It includes PLC control, a 10-inch touchscreen interface, tower light, negative pressure gauge, differential pressure switch, and other essential components.
Automatic Low pressure gas Rack
The system includes automatic switching and purging functions, featuring a 47L dual-process cylinder connected via 1/4" tubing. It is equipped with PLC control, a 10-inch touchscreen, tower light, negative pressure gauge, differential pressure switch, as well as a scale, cylinder heating, and panel surface heating.
FAQ
Q1: How do I choose between a single-cylinder and dual-cylinder configuration?
A: A dual-cylinder setup supports automatic switching and is ideal for continuous gas supply needs; a single-cylinder setup is more cost-effective and suitable when spare cylinders can be quickly replaced.
Q2: What are the advantages of the PLC control module?
A: The PLC enables remote monitoring, data logging, and alarm linkage (e.g., valve shutoff or ventilation activation), enhancing system automation.
Q3: What is the recommended maintenance cycle for the system?
A: A dual-cylinder setup supports automatic switching and is ideal for continuous gas supply needs; a single-cylinder setup is more cost-effective and suitable when spare cylinders can be quickly replaced.
Q4: How do I choose between a single-cylinder and dual-cylinder configuration?
A: It is recommended to check the system's sealing and leak rate every three months and calibrate pressure sensors and alarm thresholds annually. In cleanroom environments, inspections can be extended to every six months.
Q5: How is gas leakage detected?
A: Full system inspection is performed using a helium mass spectrometer leak detector. In daily operations, potential leaks can be indicated by abnormal pressure curve readings.
Q6: Can the touchscreen export historical data?
A: The standard touchscreen displays real-time data. If a PLC module is selected, it supports historical data storage and export (e.g., CSV format).
Q7: Does the system support corrosive gases?
A:Support for corrosive gases requires customized materials (e.g., duplex stainless steel) and sealing components. Please contact our technical support team to confirm compatibility.
Conclusion
The VIGOUR Specialty Gas Control Rack provides precise control and adheres to strict safety standards, offering a reliable specialty gas management solution for high-end manufacturing and research sectors. For customized configurations or technical details, please contact the official VIGOUR service team.
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