VSR 50UB series Single stage gas pressure regulator
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✅The product is suitable for controlling bulk gases and specialty gases in ultra-high purity gas supply systems in the semiconductor industry.
✅Low pressure regulation, with a small fluctuation range of outlet pressure (within ± 1%), meets the needs of highly sensitive scenarios such as semiconductor manufacturing and laboratories.
✅Product Feature
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Single-stage pressure regulator
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10uin. Ra surface finish (25uin. Ra optional)Minimized internal volume for short purge times.
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All materials used meet ASTM A479 /A484 /A276 standards.
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The product is fabricated in compliance with the VS001B process specification.
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Internal connectors for pressure gauges
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Flow capacity: to 15 slpm (standard), to 30 slpm (optional)
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100% helium-leak-tested
✅Product link: http://www.vigourco.com/products_info_27.html
