INTEGRATED GAS SYSTEM>> IGS Product Series Sharing
VIGOUR provides advanced Integrated Gas Systems (IGS) designed specifically for high-purity gas control in the semiconductor manufacturing industry. Our solutions combine innovative engineering with stringent manufacturing standards to ensure reliability, compactness, and superior performance in critical applications.
Product Features
- Used for gas control in the semiconductor industry
- Modular design
- All components are surface mounted in accordance with SEMl standard
- The size is about 1/3 the traditional panel
- SEMl standard material, electropolishing process and orbital welding
- Wseal and C-seal optional
- Double bagged in cleanroom
- All products, except "brackets", are all produced in accordance with the VS001A process specification
IGS Pressure Regulators VIR Series
1. Max. Working Pressure: 150 psig
2. Max. Working Temp: -40°F~140°F(-40°C~60°C)
3. Outlet Pressure: 0~100 psig
4. The surface finish: Max. 5uin. Ra
5. Material: 316L VIM-VAR
6. Valve Seat: PCTFE(PFA/Vespel optional)
7. Flow Capacity: Cv=0.08
IGS Diaphragm Valves VID Series
1. Max. Working Pressure: 150 psig
2. Max. Working Temp: PCTFE 14°F~176°F(-10°C~80°C); PFA 14°F~302°F(-10°℃~150°C)
3. No dead end design
4. The wet surface is treated with EP, Max. 5uin. Ra.
5. Material: 316L VIM-VAR
6. 100% Helium-leak-tested
7. Flow Capacity: Cv=0.1
IGS Flow Control Valves VIM Series
1. Max. Working Pressure: 150 psig
2. Max. Working Temp: 14°F~302°F(-10°C~150°C)
3. Sealing: FKM
4. The wet surface is treated with EP, Max. 5uin. Ra
5. Flow Capacity: Cv=0.03
IGS Check Valves VICV Series
1. Max. Working Pressure: 150 psig
2. Max. Working Temp: 14°F~176°F(-10°C~80℃)
3. Suface Finish: Max. 5uin. Ra
4. Cracking Pressure: 0.33 psig
5. Flow Capacity: Cv=0.2
Substrates VlB Series (C-seal)
1. C-seal
2. Non-fixed installation to ensure the sealing effect
3. The wet part is treated with EP
4. The surface finish: Max. 5uin.Ra
5. Material: 316L VIM-VAR
Core Product Series
- IGS Pressure Regulators (VIR Series)
- IGS Diaphragm Valves (VID Series)
- IGS Flow Control Valves (VIM Series)
- IGS Check Valves (VICV Series)
- IGS Substrates & Brackets (VIB Series)
- Gaskets (VIG Series)
Why Choose VIGOUR IGS?
Our systems represent a synergy of precision engineering and practical design, delivering:
- Space Efficiency: Dramatically reduced panel size.
- Ultra-High Purity: Materials and processes tailored for semiconductor-grade applications.
- Modular Flexibility: Easy to configure, expand, and maintain.
- Proven Reliability: Stringent testing and SEMI-standard compliance.
At VIGOUR, we offer more than just components-we provide integrated solutions that bring your ideas to life with confidence and precision.
